However, the process, known as reactive ion etching, isn't fully understood and could be improved. One recent development ...

Similar to how a ship rusts when exposed to seawater, plasma used during the etching process continuously reacts with the internal components of the equipment, leading to corrosion and contamination.

Several etch vendors are starting to ship next-generation selective etch tools, paving the way for new memory and logic devices. Applied Materials was the first vendor to ship a next-gen selective ...

Through via hole fabrication process by deep reactive-ion etching (DRIE): (a) Sample cleaning; (b) Deposition of mask material; (c) Transfer of desired pattern; (d) Desired pattern achieved; (e) ...

Reactive Ion Etch (RIE) is a physical etch process. A rich plasma has been made just above the wafer, and the ions are expedited toward the surface to generate a highly powerful anisotropic etch.

During the fabrication process, we need to etch out the unwanted oxide layer from the wafer, which can be done using plasma etching. Plasma contains high energetic ions and radicals for etching that ...

This array of holes then acts as a mask for a standard plasma etching process that drills vertical nanocolumns in the insulator. Subsequent steps dissolve the partitions between the nanocolumns to ...

What is Atomic Layer Etching? Atomic layer etching (ALE) is a highly controlled and selective etching technique that removes material layer by layer at the atomic scale. It is a cyclic process that ...